Controller and Estimator Design for Regulation of Film Thickness, Surface Roughness, and Porosity in a Multiscale Thin Film Growth Process
| العنوان: | Controller and Estimator Design for Regulation of Film Thickness, Surface Roughness, and Porosity in a Multiscale Thin Film Growth Process |
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| المؤلفون: | Xinyu Zhang, Panagiotis D. Christofides, Gangshi Hu, Gerassimos Orkoulas |
| المصدر: | Industrial & Engineering Chemistry Research. 49:7795-7806 |
| بيانات النشر: | American Chemical Society (ACS), 2009. |
| سنة النشر: | 2009 |
| مصطلحات موضوعية: | Model predictive control, Materials science, Partial differential equation, General Chemical Engineering, Surface roughness, Hexagonal lattice, General Chemistry, Kinetic Monte Carlo, Mechanics, Surface finish, Thin film, Porosity, Industrial and Manufacturing Engineering |
| الوصف: | This work focuses on simultaneous regulation of film thickness, surface roughness, and porosity in a multiscale model of a thin film growth process using the inlet precursor concentration as the manipulated input. Specifically, under the assumption of continuum, a partial differential equation model is first derived to describe the dynamics of the precursor concentration in the gas phase. The thin film growth process is modeled via a microscopic kinetic Monte Carlo simulation model on a triangular lattice with vacancies and overhangs allowed to develop inside the film. Closed-form dynamic models of the thin film surface profile and porosity are developed and used as the basis for the design of model predictive control algorithms to simultaneously regulate film thickness, surface roughness, and porosity. Both state feedback and porosity estimation-based output feedback control algorithms are presented. Simulation results demonstrate the applicability and effectiveness of the proposed modeling and control approach by applying the proposed controllers to the multiscale model of the thin film growth process. |
| تدمد: | 1520-5045 0888-5885 |
| DOI: | 10.1021/ie901396g |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::b64845ccd881234dfa64663ae1bbc7f0 https://doi.org/10.1021/ie901396g |
| رقم الانضمام: | edsair.doi...........b64845ccd881234dfa64663ae1bbc7f0 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 15205045 08885885 |
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| DOI: | 10.1021/ie901396g |