The impact of self-aligned amorphous Si thin film transistors on imager array applications

التفاصيل البيبلوغرافية
العنوان: The impact of self-aligned amorphous Si thin film transistors on imager array applications
المؤلفون: Y. Wang, Ping Mei, J. B. Boyce, Jeffrey T. Rahn, JengPing Lu, R. A. Street, Jackson Ho
المصدر: Journal of Non-Crystalline Solids. :1294-1298
بيانات النشر: Elsevier BV, 2000.
سنة النشر: 2000
مصطلحات موضوعية: Fabrication, Materials science, business.industry, Clock rate, Condensed Matter Physics, Noise (electronics), Electronic, Optical and Magnetic Materials, Amorphous solid, Parasitic capacitance, Thin-film transistor, Materials Chemistry, Ceramics and Composites, Optoelectronics, business, Electronic circuit, Shift register
الوصف: Laser processing allows the fabrication of self-aligned amorphous Si thin film transistors (a-Si:H TFTs). These devices have much smaller parasitic capacitance between gates and source/drain contacts and can have much shorter channel lengths compared to the conventional a-Si:H TFTs. We have fabricated matrix-addressed, optical imager arrays using these new a-Si:H TFTs as pixel switches. We also have demonstrated that four-phase dynamic shift registers using short channel a-Si:H TFTs can be operated at a clock speed of 400 kHz (less than 0.625 μs for each clock phase), indicating the possibility of integrating some of the peripheral circuits based on a-Si:H TFT technology. The advantages of using self-aligned a-Si TFTs as pixel switches in large-area, flat-panel imagers are discussed. Improved noise performance is expected for large area imager arrays.
تدمد: 0022-3093
DOI: 10.1016/s0022-3093(99)00940-0
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ad04b19efb39ffbba22c41c925ac7a02
https://doi.org/10.1016/s0022-3093(99)00940-0
Rights: CLOSED
رقم الانضمام: edsair.doi...........ad04b19efb39ffbba22c41c925ac7a02
قاعدة البيانات: OpenAIRE
الوصف
تدمد:00223093
DOI:10.1016/s0022-3093(99)00940-0