Uniform Spin Qubit Devices with Tunable Coupling in an All-Silicon 300 mm Integrated Process

التفاصيل البيبلوغرافية
العنوان: Uniform Spin Qubit Devices with Tunable Coupling in an All-Silicon 300 mm Integrated Process
المؤلفون: J. Jussot, R. Li, M.M. Heyns, Stefan Kubicek, M. Shehata, George Simion, Y. Canvel, Bogdan Govoreanu, N. I. Dumoulin Stuyck, Boon Teik Chan, Iuliana Radu, Ludovic Goux, Clément Godfrin, Fahd A. Mohiyaddin, A. Elsayed
المصدر: 2021 Symposium on VLSI Circuits.
بيانات النشر: IEEE, 2021.
سنة النشر: 2021
مصطلحات موضوعية: Physics, Silicon, business.industry, Energy level splitting, chemistry.chemical_element, Electron, engineering.material, Coupling (probability), Noise (electronics), Polycrystalline silicon, chemistry, Qubit, engineering, Optoelectronics, Spin (physics), business
الوصف: Larger arrays of electron spin qubits require radical improvements in fabrication and device uniformity. Here we demonstrate excellent qubit device uniformity and tunability from 300K down to mK temperatures. This is achieved, for the first time, by integrating an overlapping polycrystalline silicon-based gate stack in an 'all-Silicon' and lithographically flexible 300mm flow. Low-disorder Si/SiO$_2$ is proved by a 10K Hall mobility of $1.5 \cdot 10^4$ $cm^2$/Vs. Well-controlled sensors with low charge noise (3.6 $\mu$eV/$\sqrt{\mathrm{Hz}}$ at 1 Hz) are used for charge sensing down to the last electron. We demonstrate excellent and reproducible interdot coupling control over nearly 2 decades (2-100 GHz). We show spin manipulation and single-shot spin readout, extracting a valley splitting energy of around 150 $\mu$eV. These low-disorder, uniform qubit devices and 300mm fab integration pave the way for fast scale-up to large quantum processors.
DOI: 10.23919/vlsicircuits52068.2021.9492427
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a802664a4b1ff084b9679f12818db7fd
https://doi.org/10.23919/vlsicircuits52068.2021.9492427
Rights: OPEN
رقم الانضمام: edsair.doi...........a802664a4b1ff084b9679f12818db7fd
قاعدة البيانات: OpenAIRE
الوصف
DOI:10.23919/vlsicircuits52068.2021.9492427