Silicidation induced strain phenomena in totally silicided (TOSI) gate transistors

التفاصيل البيبلوغرافية
العنوان: Silicidation induced strain phenomena in totally silicided (TOSI) gate transistors
المؤلفون: Francois Leverd, A. Toffoli, D. Aime, Alexandre Talbot, Thomas Skotnicki, A. Mondot, Simone Pokrant, Florian Cacho, M. Muller, Pascal Besson, S. Descombes, Yves Morand, B. Froment, M. Rivoire
المصدر: Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005..
بيانات النشر: IEEE, 2005.
سنة النشر: 2005
مصطلحات موضوعية: Fabrication, Materials science, business.industry, law, Chemical-mechanical planarization, Transconductance, MOSFET, Transistor, Electronic engineering, Optoelectronics, business, law.invention
الوصف: In this paper, we present a detailed analysis of the performance and transport characteristics in totally Ni silicided (TOSI) devices. For two different TOSI integration schemes, we study transconductance variations of TOSI devices with respect to poly-Si gated devices. We find a clear signature of process induced strain related to the total gate silicidation step which depends largely on the integration scheme used for the fabrication of the TOSI devices.
DOI: 10.1109/essder.2005.1546676
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9fa594e289881966ecc2a3364a062cdd
https://doi.org/10.1109/essder.2005.1546676
رقم الانضمام: edsair.doi...........9fa594e289881966ecc2a3364a062cdd
قاعدة البيانات: OpenAIRE
الوصف
DOI:10.1109/essder.2005.1546676