Preparation of cobalt oxide films by plasma-enhanced metalorganic chemical vapour deposition
| العنوان: | Preparation of cobalt oxide films by plasma-enhanced metalorganic chemical vapour deposition |
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| المؤلفون: | Atsushi Tomozawa, Eiji Fujii, Ryoichi Takayama, Takashi Hirao, Hideo Torii |
| المصدر: | Journal of Materials Science. 30:6013-6018 |
| بيانات النشر: | Springer Science and Business Media LLC, 1995. |
| سنة النشر: | 1995 |
| مصطلحات موضوعية: | Materials science, Mechanical Engineering, chemistry.chemical_element, Mineralogy, Substrate (electronics), Chemical vapor deposition, Carbon film, chemistry, Chemical engineering, Mechanics of Materials, Plasma-enhanced chemical vapor deposition, General Materials Science, Metalorganic vapour phase epitaxy, Thin film, Cobalt, Cobalt oxide |
| الوصف: | Co oxide films were prepared on glass substrates at 150–400°C by plasma-enhanced metalorganic chemical vapour deposition using cobalt (II) acetylacetonate as a source material. NaCl-type CoO films were formed at low O2 flow rate of 7cm3 min−1 and at a substrate temperature of 150–400°C. The CoO films possessed (100) orientation, independent of substrate temperature. Deposition rates of the CoO films were 40–47 nm min−1. The CoO film deposited at 400 °C was composed of closely packed columnar grains and average diameter size at film surface was 60 nm. At high O2 flow rate of 20–50 cm3 min−1, high crystalline spinel-type Co3O4 films were formed at a substrate temperature of 150–400°C. The Co3O4 film deposited at 400°C possessed (100) preferred orientation and the film deposited at 150°C possessed (111) preferred orientation. Deposition rates of the Co3O4 films were 20–41 nm min−1. Both Co3O4 films with (100) and (111) orientation had columnar structure. The shape and average size of the columnar grains at the film surface were different; a square shape and 35 nm for (100)-oriented Co3O4 film and a hexagonal shape and 60 nm for (111)-oriented film, respectively. |
| تدمد: | 1573-4803 0022-2461 |
| DOI: | 10.1007/bf01151521 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::983fe8f9f1d0a425020986d4e41f491f https://doi.org/10.1007/bf01151521 |
| Rights: | CLOSED |
| رقم الانضمام: | edsair.doi...........983fe8f9f1d0a425020986d4e41f491f |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 15734803 00222461 |
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| DOI: | 10.1007/bf01151521 |