Metalorganic vapor phase epitaxy (MOVPE) growth and characterization of AlInAsSb and AlInAsSb/InGaAs multiple-quantum-well structures

التفاصيل البيبلوغرافية
العنوان: Metalorganic vapor phase epitaxy (MOVPE) growth and characterization of AlInAsSb and AlInAsSb/InGaAs multiple-quantum-well structures
المؤلفون: Wei Lin, Hung-Pin Shiao, D. H. Jaw, Yan-Kuin Su, Jia-Rong Chang
المصدر: Journal of Crystal Growth. 203:481-485
بيانات النشر: Elsevier BV, 1999.
سنة النشر: 1999
مصطلحات موضوعية: Electron mobility, Photoluminescence, Dopant, Dimethylzinc, Analytical chemistry, Mineralogy, Condensed Matter Physics, Epitaxy, Inorganic Chemistry, Secondary ion mass spectrometry, chemistry.chemical_compound, chemistry, Materials Chemistry, Metalorganic vapour phase epitaxy, Thin film
الوصف: AlInAsSb and Al 0.66 In 0.34 As 0.85 Sb 0.15 /In 0.53 Ga 0.47 As multiple-quantum-well (MQW) structures were grown by metalorganic vapor phase epitaxy. Silane (SiH 4 ) and dimethylzinc (DMZn) were used as n-type and p-type dopants, respectively. The electron concentration of the AlInAsSb bulk layer increases from 5.2×10 16 to 2.8×10 17 cm −3 and the mobility decreases from 1204 to 703 cm 2 /V s with the flow rate of SiH 4 increasing from 20 to 150 sccm. The hole concentration of the AlInAsSb bulk layer increases from 2.06×10 15 to 5.8×10 17 cm −3 and the mobility decreases from 284 to 120 cm 2 /V s with the flow rate of DMZn increasing from 20 to 200 sccm. Double crystal X-ray diffraction, secondary ion mass spectrometry, and photoluminescence were used to characterize the MQW structures.
تدمد: 0022-0248
DOI: 10.1016/s0022-0248(99)00114-1
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9154059cacbca13fa0101e4c17b4ab82
https://doi.org/10.1016/s0022-0248(99)00114-1
Rights: CLOSED
رقم الانضمام: edsair.doi...........9154059cacbca13fa0101e4c17b4ab82
قاعدة البيانات: OpenAIRE
الوصف
تدمد:00220248
DOI:10.1016/s0022-0248(99)00114-1