A comparative study on simulation performances of rigid and bendable SAW for gas sensor

التفاصيل البيبلوغرافية
العنوان: A comparative study on simulation performances of rigid and bendable SAW for gas sensor
المؤلفون: Rashidah Arsat, Rafidah Ibrahim, A. A. M. Idris, Fatini Sidek, Leow Pei Ling, Zaharah Johari
المصدر: AIP Conference Proceedings.
بيانات النشر: Author(s), 2017.
سنة النشر: 2017
مصطلحات موضوعية: Engineering, Flexibility (anatomy), business.industry, Acoustics, Multiphysics, Surface acoustic wave, Structural engineering, Bending, Substrate (electronics), Displacement (vector), medicine.anatomical_structure, medicine, business, Reduction (mathematics), Layer (electronics)
الوصف: Flexible Surface Acoustic Wave (SAW) devices are very promising technology for various applications that offers excellent flexibility, low in cost and light weight. In this paper, a SAW gas sensor is designed and simulated using COMSOL Multiphysics to investigate the degree of bending effect on the frequency and displacement. The investigations were conducted onto SAW gas sensor as rigid and two different bends direction; bend-in (concave) and bend-out (convex). The operating frequency of the SAW sensor were found to be at the range of 80-200 MHz. The frequency shift of the sensor were obtained after exposing the polyisobutylene (PIB) to the dichloromethane DCM gas which will change the density of sensing layer. From the simulation, it is shown that resonance frequency range of 189MHz for the rigid substrate with displacement of 0.706 nm. Notably, the bending degree of h range from 0.2 µm to 1.25 µm exhibits reduction for displacement and frequency. The higher frequency of bend-out (convex) design achieve...
تدمد: 0094-243X
DOI: 10.1063/1.4975281
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::87b356e76361aa9b6d4b2f09108d3a99
https://doi.org/10.1063/1.4975281
رقم الانضمام: edsair.doi...........87b356e76361aa9b6d4b2f09108d3a99
قاعدة البيانات: OpenAIRE
الوصف
تدمد:0094243X
DOI:10.1063/1.4975281