In depth TCAD analysis of threshold voltage on GaN-on-Si MOS-channel fully recessed gate HEMTs

التفاصيل البيبلوغرافية
العنوان: In depth TCAD analysis of threshold voltage on GaN-on-Si MOS-channel fully recessed gate HEMTs
المؤلفون: William Vandendaele, A. G. Viey, C. Le Royer, R. Modica, Erwan Morvan, Laura Vauche, Sebastien Martinie, Marie-Anne Jaud, Steve W. Martin, R. Gwoziecki, Thierry Poiroux, Ferdinando Iucolano, Marc Plissonnier, B. Rrustemi
المصدر: 2021 33rd International Symposium on Power Semiconductor Devices and ICs (ISPSD).
بيانات النشر: IEEE, 2021.
سنة النشر: 2021
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, 020208 electrical & electronic engineering, Gate length, 02 engineering and technology, Integrated circuit, 01 natural sciences, Threshold voltage, law.invention, law, Logic gate, 0103 physical sciences, 0202 electrical engineering, electronic engineering, information engineering, Optoelectronics, business, Conduction band, Communication channel
الوصف: The fully recessed gate GaN-on-Si MOS-channel HEMTs (MOSc-HEMT) with Back-Barrier (BB) structure gives rise to unexpected threshold voltage (V TH ) behaviors such as V TH increase with decreasing gate length (L G ) (V TH roll-up) and discrepancies between V TH values extracted from I D (V G ) (V TH_IV ) and from C GC (V G ) (V TH_CV ) characteristics. Using TCAD simulations and experimental measurements, we demonstrate that conduction band confinement, especially at gate corners, is responsible for these peculiar V TH behaviors. This band confinement is strengthened by the fully recessed gate configuration coupled with the proximity of a back-barrier.
DOI: 10.23919/ispsd50666.2021.9452257
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::7ceec7602716bedc3c5cc00fc7a9db9c
https://doi.org/10.23919/ispsd50666.2021.9452257
Rights: CLOSED
رقم الانضمام: edsair.doi...........7ceec7602716bedc3c5cc00fc7a9db9c
قاعدة البيانات: OpenAIRE
الوصف
DOI:10.23919/ispsd50666.2021.9452257