Sub-micron, Non-contact, Super-resolution Infrared Microspectroscopy for Microelectronics Contamination and Failure Analyses

التفاصيل البيبلوغرافية
العنوان: Sub-micron, Non-contact, Super-resolution Infrared Microspectroscopy for Microelectronics Contamination and Failure Analyses
المؤلفون: Craig Prater, Curtis Marcott, Eoghan Dillon, Michael Lo, Mustafa Kansiz
المصدر: 2020 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).
بيانات النشر: IEEE, 2020.
سنة النشر: 2020
مصطلحات موضوعية: Materials science, Infrared, business.industry, Infrared spectroscopy, Photothermal therapy, symbols.namesake, Microscopy, symbols, Microelectronics, Optoelectronics, Spectroscopy, business, Raman spectroscopy, Image resolution
الوصف: We demonstrate sub-micron, non-contact measurement of infrared spectra from failed interconnects in microelectronics and from a dark contamination particle in a polymer-based computer screen. This unique capability has been achieved with the advent of Optical PhotoThermal InfraRed (O-PTIR) spectroscopy, which has only been recently commercially available in the simultaneous IR and Raman platform. The defective regions of the exhibited examples have been exposed to the surface and have been analyzed as received to highlight the relaxed sample preparation requirement. The presentation illustrates the versatility and high spatial resolution of the O-PTIR technique for contamination identification and failure analysis applications.
DOI: 10.1109/ipfa49335.2020.9261071
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6f568cd375d024b7b58e1b8f211f98f9
https://doi.org/10.1109/ipfa49335.2020.9261071
Rights: CLOSED
رقم الانضمام: edsair.doi...........6f568cd375d024b7b58e1b8f211f98f9
قاعدة البيانات: OpenAIRE
الوصف
DOI:10.1109/ipfa49335.2020.9261071