Stacked image sensor using chlorine-doped crystalline selenium photoconversion layer composed of size-controlled polycrystalline particles

التفاصيل البيبلوغرافية
العنوان: Stacked image sensor using chlorine-doped crystalline selenium photoconversion layer composed of size-controlled polycrystalline particles
المؤلفون: K. Kikuchi, Misao Kubota, K. Miyakawa, Toru Okino, Hiroshi Ohtake, Yutaka Hirose, Yumiko Kato, S. Imura, Nobukazu Teranishi
المصدر: 2015 IEEE International Electron Devices Meeting (IEDM).
بيانات النشر: IEEE, 2015.
سنة النشر: 2015
مصطلحات موضوعية: Materials science, business.industry, Doping, Substrate (electronics), Photodiode, law.invention, Condensed Matter::Materials Science, Semiconductor, law, Condensed Matter::Superconductivity, Optoelectronics, Condensed Matter::Strongly Correlated Electrons, Crystallite, Image sensor, business, Layer (electronics), Dark current
الوصف: We demonstrate a stacked complementary metal-oxide semiconductor (CMOS) image sensor overlaid with a chlorine (Cl)-doped crystalline selenium (c-Se) photoconversion layer. The size of the polycrystalline particles (grains) of c-Se, which is strongly related to dark current pattern noise, is controlled by Cl doping to c-Se; hence, the resulting device provides clear images. Furthermore, avalanche multiplication was successfully observed in a Cl-doped c-Se film fabricated on a glass substrate at a relatively low applied voltage.
DOI: 10.1109/iedm.2015.7409804
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::694ccfc7753fa9ce2cce2552092b86ec
https://doi.org/10.1109/iedm.2015.7409804
رقم الانضمام: edsair.doi...........694ccfc7753fa9ce2cce2552092b86ec
قاعدة البيانات: OpenAIRE
الوصف
DOI:10.1109/iedm.2015.7409804