Limitations of optical lithography on non-planar surfaces
| العنوان: | Limitations of optical lithography on non-planar surfaces |
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| المؤلفون: | Agnieszka Zawadzka, Regina Paszkiewicz |
| المصدر: | Materials Science in Semiconductor Processing. 143:106548 |
| بيانات النشر: | Elsevier BV, 2022. |
| سنة النشر: | 2022 |
| مصطلحات موضوعية: | Mechanics of Materials, Mechanical Engineering, General Materials Science, Condensed Matter Physics |
| تدمد: | 1369-8001 |
| DOI: | 10.1016/j.mssp.2022.106548 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::68d5c055047251fa6faba340c21d22ad https://doi.org/10.1016/j.mssp.2022.106548 |
| Rights: | CLOSED |
| رقم الانضمام: | edsair.doi...........68d5c055047251fa6faba340c21d22ad |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 13698001 |
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| DOI: | 10.1016/j.mssp.2022.106548 |