التفاصيل البيبلوغرافية
| العنوان: |
On the influence of Ni(Pt)Si thin film formation on agglomeration threshold temperature and its impact on 3D imaging technology integration |
| المؤلفون: |
M. Grégoire, F. Morris Anak, S. Verdier, K. Dabertrand, S. Guillemin, D. Mangelinck |
| المصدر: |
Microelectronic Engineering. :111937 |
| بيانات النشر: |
Elsevier BV, 2023. |
| سنة النشر: |
2023 |
| مصطلحات موضوعية: |
Electrical and Electronic Engineering, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials |
| تدمد: |
0167-9317 |
| DOI: |
10.1016/j.mee.2023.111937 |
| URL الوصول: |
https://explore.openaire.eu/search/publication?articleId=doi_________::6881c7757356f5b85d08563671fbf1b7
https://doi.org/10.1016/j.mee.2023.111937 |
| Rights: |
CLOSED |
| رقم الانضمام: |
edsair.doi...........6881c7757356f5b85d08563671fbf1b7 |
| قاعدة البيانات: |
OpenAIRE |