Sensitive elements of microelectronic sensors of fast variable and static pressure
| العنوان: | Sensitive elements of microelectronic sensors of fast variable and static pressure |
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| المؤلفون: | E. A. Pecherskaya, S A Gurin, A. V. Fimin, P. E. Golubkov, G. V. Kozlov, K. Y. Kraynova |
| المصدر: | Journal of Physics: Conference Series. 1410:012230 |
| بيانات النشر: | IOP Publishing, 2019. |
| سنة النشر: | 2019 |
| مصطلحات موضوعية: | History, Variable (computer science), Materials science, business.industry, Acoustics, Microelectronics, Static pressure, business, Computer Science Applications, Education |
| الوصف: | The technical progress development contributes to the introduction of automated methods of management and control of the system state. The use of sensor equipment with the use of piezoelectric tensor-resistive modules allows to register fast variable and statistical pressure, respectively. Such assemblies possess not only the most reliable information content of the measured values, but also combine simple step-by-step manufacturing techniques. |
| تدمد: | 1742-6596 1742-6588 |
| DOI: | 10.1088/1742-6596/1410/1/012230 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::4c77152fb03816917610e37369b98bdf https://doi.org/10.1088/1742-6596/1410/1/012230 |
| Rights: | OPEN |
| رقم الانضمام: | edsair.doi...........4c77152fb03816917610e37369b98bdf |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 17426596 17426588 |
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| DOI: | 10.1088/1742-6596/1410/1/012230 |