Manufacturable and rugged 1.2 KV SiC MOSFETs fabricated in high-volume 150mm CMOS fab

التفاصيل البيبلوغرافية
العنوان: Manufacturable and rugged 1.2 KV SiC MOSFETs fabricated in high-volume 150mm CMOS fab
المؤلفون: Blake Powell, D. Gutierrez, C. Hundley, Kiran Chatty, Sujit Banerjee, Kevin Matocha, J. Nowak
المصدر: 2016 28th International Symposium on Power Semiconductor Devices and ICs (ISPSD).
بيانات النشر: IEEE, 2016.
سنة النشر: 2016
مصطلحات موضوعية: 010302 applied physics, Materials science, business.industry, Electrical engineering, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Design for manufacturability, chemistry.chemical_compound, Reliability (semiconductor), CMOS, chemistry, Gate oxide, Logic gate, 0103 physical sciences, MOSFET, Silicon carbide, Optoelectronics, Junction temperature, 0210 nano-technology, business
الوصف: Design and manufacturing process for high-voltage SiC MOSFETs have been developed in a 150mm CMOS fab. 1.2KV MOSFETs have been fabricated on this production line running in parallel with CMOS wafers. Typical devices have state-of-the-art performance with specific on-resistance of 4.5milliohm-cm2 and low leakage current up to 175°C junction temperature. The process manufacturability and quality of 150mm SiC wafers have been verified by running multiple lots/wafers with consistent results. Devices are stable under avalanche conditions and have been subjected to long term High Temperature Reverse Bias (HTRB) stress at 175°C with passing results. Quality of gate oxide has been confirmed with excellent charge-to-breakdown (Qbd) distribution with mean values >10C/cm2. Manufacturing rugged 1.2 KV SiC MOSFETs in high-volume 150mm CMOS fab can disrupt cost and reliability barriers of SiC MOSFETs and drive wide spread adoption.
DOI: 10.1109/ispsd.2016.7520832
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4baaf8fc5a088418ffcdeb9e4bd08fba
https://doi.org/10.1109/ispsd.2016.7520832
رقم الانضمام: edsair.doi...........4baaf8fc5a088418ffcdeb9e4bd08fba
قاعدة البيانات: OpenAIRE
الوصف
DOI:10.1109/ispsd.2016.7520832