Alleviating Sample Charging during FIB Operation

التفاصيل البيبلوغرافية
العنوان: Alleviating Sample Charging during FIB Operation
المؤلفون: Chee Lip Gan, Qing Liu, Y.W. Siah, H. B. Kor
المصدر: International Symposium for Testing and Failure Analysis.
بيانات النشر: ASM International, 2015.
سنة النشر: 2015
مصطلحات موضوعية: Materials science, business.industry, Optoelectronics, business, Sample (graphics)
الوصف: Dual-beam focused ion beam (DB-FIB) system is widely used in the semiconductor industry to prepare cross-sections and transmission electron microscopy (TEM) lamellae, modify semiconductor devices and verify layout. One of the factors that limits its success rate is sample charging, which is caused by a lack of conductive path to discharge the accumulated charges. In this paper, an approach using an insitu micromanipulator was investigated to alleviate the charging effects. With this approach, a simple front side semiconductor device modification was carried out and the corresponding stage current was monitored to correlate to the milling process.
تدمد: 0890-1740
DOI: 10.31399/asm.cp.istfa2015p0087
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::436bff1e445bf2ee5428d7939e9e13de
https://doi.org/10.31399/asm.cp.istfa2015p0087
رقم الانضمام: edsair.doi...........436bff1e445bf2ee5428d7939e9e13de
قاعدة البيانات: OpenAIRE
الوصف
تدمد:08901740
DOI:10.31399/asm.cp.istfa2015p0087