Effect of vapor phase composition on the properties of CVD 3C-SiC
| العنوان: | Effect of vapor phase composition on the properties of CVD 3C-SiC |
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| المؤلفون: | M. N. Shakhov, L. M. Ivanova, K. D. Demakov |
| المصدر: | Inorganic Materials. 47:369-374 |
| بيانات النشر: | Pleiades Publishing Ltd, 2011. |
| سنة النشر: | 2011 |
| مصطلحات موضوعية: | Materials science, General Chemical Engineering, Vapor phase, Metals and Alloys, Microstructure, Deposition temperature, Inorganic Chemistry, chemistry.chemical_compound, Compressive strength, stomatognathic system, chemistry, Electrical resistivity and conductivity, Materials Chemistry, Silicon carbide, Composition (visual arts), Crystallite, Composite material |
| الوصف: | We have studied the effect of silicon-enriched vapor phase composition, deposition temperature, and CH3SiCl3 precursor concentration on the microstructure, resistivity, and compressive strength of 3C-SiC layers and optimized the conditions for the growth of polycrystalline 3C-SiC layers possessing high resistivity and compressive strength. |
| تدمد: | 1608-3172 0020-1685 |
| DOI: | 10.1134/s0020168511040157 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::4344e094c7217f1020165868a21a9c76 https://doi.org/10.1134/s0020168511040157 |
| Rights: | CLOSED |
| رقم الانضمام: | edsair.doi...........4344e094c7217f1020165868a21a9c76 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 16083172 00201685 |
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| DOI: | 10.1134/s0020168511040157 |