Electrical behaviour and microstructural analysis of metal Schottky contacts on 4H-SiC

التفاصيل البيبلوغرافية
العنوان: Electrical behaviour and microstructural analysis of metal Schottky contacts on 4H-SiC
المؤلفون: D. Defives, O. Noblanc, F. Wyczisk, O. Durand, F. Meyer, C. Brylinski
المصدر: Microelectronic Engineering. 55:369-374
بيانات النشر: Elsevier BV, 2001.
سنة النشر: 2001
مصطلحات موضوعية: Auger electron spectroscopy, Materials science, business.industry, Schottky barrier, Fermi level, Schottky diode, chemistry.chemical_element, Tungsten, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, symbols.namesake, Optics, chemistry, symbols, Electrical measurements, Metallizing, Electrical and Electronic Engineering, Composite material, business, Surface states
الوصف: Schottky contacts are investigated on n-type 4H-SiC by electrical measurements and microstructural analyses to understand the behaviour of such a barrier. Titanium and tungsten were deposited after RCA cleaning as surface preparation of SiC. Electrical characterisation shows that the Fermi level is partially pinned by interfacial surface states attributed to an interfacial layer between the metal and the SiC. This interfacial layer is characterised by X-ray reflectivity, transmission electron microscopy and Auger electron spectroscopy. An attempt is made to correlate microstructural observations with electrical measurements.
تدمد: 0167-9317
DOI: 10.1016/s0167-9317(00)00469-x
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3dde7605eb48960c99a37d0036853abc
https://doi.org/10.1016/s0167-9317(00)00469-x
Rights: CLOSED
رقم الانضمام: edsair.doi...........3dde7605eb48960c99a37d0036853abc
قاعدة البيانات: OpenAIRE
الوصف
تدمد:01679317
DOI:10.1016/s0167-9317(00)00469-x