التفاصيل البيبلوغرافية
| العنوان: |
Evaluation of Cleaning Recipes Based on Ozonated Water for Pre-Gate Oxide Cleaning |
| المؤلفون: |
M. Baeyens, Joong S. Jeon, Paul Mertens, Bob Ogle |
| المصدر: |
Solid State Phenomena. :119-122 |
| بيانات النشر: |
Trans Tech Publications, Ltd., 1998. |
| سنة النشر: |
1998 |
| مصطلحات موضوعية: |
Materials science, Gate oxide, Metallurgy, General Materials Science, Condensed Matter Physics, Atomic and Molecular Physics, and Optics |
| تدمد: |
1662-9779 |
| DOI: |
10.4028/www.scientific.net/ssp.65-66.119 |
| URL الوصول: |
https://explore.openaire.eu/search/publication?articleId=doi_________::2dcf0d6d7f2c06d380ded488b5a7c7e0
https://doi.org/10.4028/www.scientific.net/ssp.65-66.119 |
| Rights: |
CLOSED |
| رقم الانضمام: |
edsair.doi...........2dcf0d6d7f2c06d380ded488b5a7c7e0 |
| قاعدة البيانات: |
OpenAIRE |