Measurements of pulsed‐power modulated argon plasmas in an inductively coupled plasma source
| العنوان: | Measurements of pulsed‐power modulated argon plasmas in an inductively coupled plasma source |
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| المؤلفون: | M. R. Shim, Michael A. Lieberman, Sumio Ashida |
| المصدر: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 14:391-397 |
| بيانات النشر: | American Vacuum Society, 1996. |
| سنة النشر: | 1996 |
| مصطلحات موضوعية: | Chemistry, Surfaces and Interfaces, Plasma, Square wave, Condensed Matter Physics, Surfaces, Coatings and Films, symbols.namesake, Physics::Plasma Physics, Duty cycle, symbols, Electron temperature, Continuous wave, Langmuir probe, Plasma diagnostics, Atomic physics, Inductively coupled plasma |
| الوصف: | The behavior of pulsed‐power (square wave) modulated argon plasmas generated by an inductively coupled plasma (ICP) source is experimentally investigated. The apparatus is an ICP source with a flat coil geometry equipped with a cylindrical Langmuir probe on the axis of the cylindrical chamber. The evolution of the plasma density is determined from the wave forms of ion saturation currents. The rise and fall of the density had a time scale of a few tens of microseconds. The time average plasma density is also measured as a function of pulse frequency and duty ratio, holding the average absorbed power constant. When the plasma is modulated, the density is larger than that for a continuous wave excitation of the same average power. Larger densities are obtained for smaller duty ratios. The density increases monotonically as the period is decreased down to 100 μs. This agrees qualitatively with the modeling result, which accounts for the higher density by the difference of time scales for the generation and t... |
| تدمد: | 1520-8559 0734-2101 |
| DOI: | 10.1116/1.580095 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::2cf918e62d031236abf3b1b1e4818a6b https://doi.org/10.1116/1.580095 |
| رقم الانضمام: | edsair.doi...........2cf918e62d031236abf3b1b1e4818a6b |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 15208559 07342101 |
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| DOI: | 10.1116/1.580095 |