In silicon wafer manufacturing for solar cells, the hazardous sawing waste results in serious environmental problems. In this paper, a novel approach for the recycling and reusing of slurry waste is reported. The results show that slurry waste is recycled and reused completely, and composite material of Si3N4-Si2N2O-SiC is prepared. The residual gas from oxygen enrich gas production is used, which reduced cost effectively. In addition, the reaction is exothermic, which is also energy saving and ensure the production to be continuous without external heat source. The mechanism was also discussed in this paper.