Development of an Er–Ni liquid alloy ion source

التفاصيل البيبلوغرافية
العنوان: Development of an Er–Ni liquid alloy ion source
المؤلفون: L. C. Chao, Andrew J. Steckl
المصدر: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 17:1056
بيانات النشر: American Vacuum Society, 1999.
سنة النشر: 1999
مصطلحات موضوعية: Ion beam deposition, Materials science, Ion beam, Ion beam mixing, Alloy, General Engineering, Analytical chemistry, engineering, Microbeam, engineering.material, Focused ion beam, Ion source, Ion
الوصف: We have developed a procedure for the fabrication of Er–Ni liquid alloy ion sources. The source is tested and analyzed in a MicroBeam 150 focused ion beam system. Our experimental results show that an Er2+ target current of 95–100 pA was produced, representing 50% of the total target current. The ion emission current–voltage slope is ∼36 μA/kV. Source lifetimes are generally larger than 20 h. The alloy oxidizes quickly once it is exposed to air. This must be minimized to ensure proper source performance.
تدمد: 0734-211X
DOI: 10.1116/1.590692
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::2c2eabc7f29e1e71824a7b9c8548daec
https://doi.org/10.1116/1.590692
رقم الانضمام: edsair.doi...........2c2eabc7f29e1e71824a7b9c8548daec
قاعدة البيانات: OpenAIRE
الوصف
تدمد:0734211X
DOI:10.1116/1.590692