Range-Extended Confocal Chromatic Sensor System for Double-Sided Measurement of Optical Components With High Lateral Resolution
| العنوان: | Range-Extended Confocal Chromatic Sensor System for Double-Sided Measurement of Optical Components With High Lateral Resolution |
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| المؤلفون: | Christian Haider, Martin E. Fuerst, Matthias Laimer, Ernst Csencsics, Georg Schitter |
| المصدر: | IEEE Transactions on Instrumentation and Measurement. 71:1-8 |
| بيانات النشر: | Institute of Electrical and Electronics Engineers (IEEE), 2022. |
| سنة النشر: | 2022 |
| مصطلحات موضوعية: | Electrical and Electronic Engineering, Instrumentation |
| تدمد: | 1557-9662 0018-9456 |
| DOI: | 10.1109/tim.2022.3216679 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::20571217fdac382d1ee5a1f83819a4be https://doi.org/10.1109/tim.2022.3216679 |
| Rights: | CLOSED |
| رقم الانضمام: | edsair.doi...........20571217fdac382d1ee5a1f83819a4be |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 15579662 00189456 |
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| DOI: | 10.1109/tim.2022.3216679 |