Low Gate Leakage Current HFETs Structure by a Step-FreeAirbridge Gate Process

التفاصيل البيبلوغرافية
العنوان: Low Gate Leakage Current HFETs Structure by a Step-FreeAirbridge Gate Process
المؤلفون: Hsien-Chin Chiu, Feng-Tso Chien, Yao-Tsung Tsai, Chien-Liang Chan, Chi-Ling Wang, Chien-Nan Liao
المصدر: Journal of the Korean Physical Society. 56:887-890
بيانات النشر: Korean Physical Society, 2010.
سنة النشر: 2010
مصطلحات موضوعية: Materials science, business.industry, Gate dielectric, Transistor, Electrical engineering, General Physics and Astronomy, Heterojunction, Hardware_PERFORMANCEANDRELIABILITY, Capacitance, law.invention, Gate oxide, law, Electrode, Hardware_INTEGRATEDCIRCUITS, Breakdown voltage, Optoelectronics, business, Hardware_LOGICDESIGN, Leakage (electronics)
الوصف: Conventional heterostructure field-effect transistors (HFETs) have a high gate leakage current due to the gate electrode being in contact with the exposed channel layer and with the carrier-providing layer on the mesa sidewall. In this study, we use a new step-free (SF) air-bridge gate structure to reduce the gate leakage and improve the breakdown voltage. The proposed structure does not increase any MASKs as compared with the conventional process. In addition, this new structure promises a gate-source capacitance smaller than those of conventional heterostructure FET devices. Consequently, the high-frequency performance of the HFETs using the proposed structure can be improved.
تدمد: 0374-4884
DOI: 10.3938/jkps.56.887
URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::0fca5baf962dddacb4d365e936536332
https://doi.org/10.3938/jkps.56.887
رقم الانضمام: edsair.doi...........0fca5baf962dddacb4d365e936536332
قاعدة البيانات: OpenAIRE
الوصف
تدمد:03744884
DOI:10.3938/jkps.56.887