Applications of secondary neutral mass spectrometry (SNMS) in VLSI technology
| العنوان: | Applications of secondary neutral mass spectrometry (SNMS) in VLSI technology |
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| المؤلفون: | Mariano Anderle, Lorenza Moro |
| المصدر: | Surface and Interface Analysis. 15:525-530 |
| بيانات النشر: | Wiley, 1990. |
| سنة النشر: | 1990 |
| مصطلحات موضوعية: | Very-large-scale integration, Materials science, Materials Chemistry, Analytical chemistry, Nanotechnology, Surfaces and Interfaces, General Chemistry, Dielectric, Metallizing, Thin film, Condensed Matter Physics, Mass spectrometry, Surfaces, Coatings and Films |
| تدمد: | 1096-9918 0142-2421 |
| DOI: | 10.1002/sia.740150905 |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=doi_________::0883cbf012519e18b594d34193cac77c https://doi.org/10.1002/sia.740150905 |
| Rights: | CLOSED |
| رقم الانضمام: | edsair.doi...........0883cbf012519e18b594d34193cac77c |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 10969918 01422421 |
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| DOI: | 10.1002/sia.740150905 |