Process Variability for Devices at and Beyond the 7 nm Node
| العنوان: | Process Variability for Devices at and Beyond the 7 nm Node |
|---|---|
| المؤلفون: | Lorenz, J., Asenov, A., Bär, E., Barraud, S., Millar, C., Nedjalkov, M. |
| المساهمون: | Fraunhofer Institute for Integrated Systems and Device Technology (Fraunhofer IISB), Fraunhofer (Fraunhofer-Gesellschaft), School of Engineering, University of Glasgow, Glasgow, UK, Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Synopsys Inc., Vienna University of Technology (TU Wien), European Project: 688101,H2020,H2020-ICT-2015,SUPERAID7(2016) |
| المصدر: | ECS Transactions ECS Transactions, 2018, 85 (8), pp.113-124. ⟨10.1149/08508.0113ecst⟩ ECS Transactions, Electrochemical Society, Inc., 2018, 85 (8), pp.113-124. ⟨10.1149/08508.0113ecst⟩ |
| بيانات النشر: | HAL CCSD, 2018. |
| سنة النشر: | 2018 |
| مصطلحات موضوعية: | [SPI]Engineering Sciences [physics] |
| الوصف: | International audience; Advanced CMOS devices are increasingly affected by various kinds of process variations. Whereas the impact of statistical process variations such as Random Dopant Fluctuations has for several years been discussed in numerous publications, the effect of systematic process variations which result from non-idealities of the equipment used or from various layout issues has got much less attention. Therefore, in the first part of this paper, an overview of the sources of process variability is given. In order to assess and minimize the impact of variations on device and circuit performance, relevant systematic and statistical variations must be simulated in parallel, from equipment through process to device and circuit level. Correlations must be traced from their source to the final result. In this paper the approach implemented in the cooperative Europe-an project SUPERAID7 to reach these goals is presented. |
| اللغة: | English |
| تدمد: | 1938-5862 1938-6737 |
| DOI: | 10.1149/08508.0113ecst⟩ |
| URL الوصول: | https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::e3d0aaa6ecd597665030e4ae0169bf22 https://cea.hal.science/cea-02965940 |
| رقم الانضمام: | edsair.dedup.wf.001..e3d0aaa6ecd597665030e4ae0169bf22 |
| قاعدة البيانات: | OpenAIRE |
| تدمد: | 19385862 19386737 |
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| DOI: | 10.1149/08508.0113ecst⟩ |