Silicon nitride directional coupler-based polarization beam splitter utilizing shallow ridge waveguides for improved fabrication tolerance

التفاصيل البيبلوغرافية
العنوان: Silicon nitride directional coupler-based polarization beam splitter utilizing shallow ridge waveguides for improved fabrication tolerance
المؤلفون: Chiu, Po-Hsiang, Huang, Yi-Jia, Chen, Yong-Jun, Xu, Zi-Xuan, Wang, Hsing-Hsiang, Huang, Wen-Hsien, Wang, Chun-Ta
المصدر: Chinese Journal of Physics; December 2024, Vol. 92 Issue: 1 p1078-1084, 7p
مستخلص: •A polarization beam splitter based on directional couplers was designed.•A wider coupling gap using the shallow ridge waveguide design was achieved.•A polarization beam splitter was fabricated using standard I-line lithography.•The device shows PERs over 20 dB for TE/TM modes across 120 nm.
قاعدة البيانات: Supplemental Index
الوصف
تدمد:05779073
DOI:10.1016/j.cjph.2024.10.014