Periodical
Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors
| العنوان: | Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors |
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| المؤلفون: | Zappe, Hans, Piyawattanametha, Wibool, Park, Yong-Hwa, Hwang, J.-Y., Yarar, E., Wysocki, L., Röhr, F., Wille, G., Gu-Stoppel, S. |
| المصدر: | Proceedings of SPIE; March 2024, Vol. 12899 Issue: 1 p128990E-128990E-8, 1160919p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2692907 |