التفاصيل البيبلوغرافية
| العنوان: |
ADI to in-cell overlay stability improvement for DRAM using novel scatterometry and comprehensive process control |
| المؤلفون: |
Robinson, John C., Sendelbach, Matthew J., Kim, Hyunsok, Ju, Jaewuk, Jeong, Ikhyun, Hong, Baikkyu, Nam, Sunouk, Lee, Changkyu, Lee, Kangmin, Jang, Sumin, Lee, Jaeyoun, Yang, Hongcheon, Jeong, Minho, Kim, Mingyu, Su, Hongpeng, Zhou, Wayne, Oh, Nanglyeom, Choi, Dongsub, Yaziv, Tal, Spielberg, Hedvi, Bachar, Ohad, Milo, Renan, Dirawi, Rawi |
| المصدر: |
Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124962E-124962E-9, 1124668p |
| قاعدة البيانات: |
Supplemental Index |