التفاصيل البيبلوغرافية
| العنوان: |
Inductively coupled plasma (ICP) dry etching of type II InAs/GaSb superlattice for focal plane arrays |
| المؤلفون: |
Xu, Zuyan, Wang, Yongtian, Wang, Qionghua, Cao, Liangcai, Xie, Huikai, Lee, Chengkuo, Wang, Yinghui, Yang, Bin, Luo, Haibo, Cheng, Jian, Fang, Lu, Tao, Fei, Zhu, Xubo, Wang, JinChun, He, Yingjie, Ding, Jiaxin, Yao, Guansheng, Zhang, Lixue, Cao, Xiancun, Lv, Yanqiu |
| المصدر: |
Proceedings of SPIE; November 2020, Vol. 11565 Issue: 1 p115650I-115650I-4, 1040855p |
| قاعدة البيانات: |
Supplemental Index |