Periodical
Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd’s mirror
| العنوان: | Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd’s mirror |
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| المؤلفون: | Kim, Hanbit, Jung, Hyunho, Lee, Dong-Hyun, Lee, Kyu Back, Jeon, Heonsu |
| المصدر: | Applied Optics; January 2016, Vol. 55 Issue: 2 p354-359, 6p |
| مستخلص: | We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd’s mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Λ≈600 nm exhibits a continuous period variation of ΔΛ=92 nm across 17 mm width. |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 1559128X 21553165 |
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