Periodical
Anisotropic etching of Si (100) studied by scanning electron microscopy
| العنوان: | Anisotropic etching of Si (100) studied by scanning electron microscopy |
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| المؤلفون: | Stoev, I. |
| المصدر: | Sensors and Actuators A: Physical; 1996, Vol. 51 Issue: 2 p113-116, 4p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 09244247 |
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| DOI: | 10.1016/0924-4247(95)01015-S |