Periodical
High deposition rate of aluminum oxide film by off-plane double bend filtered cathodic vacuum arc technique
| العنوان: | High deposition rate of aluminum oxide film by off-plane double bend filtered cathodic vacuum arc technique |
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| المؤلفون: | Choong, Y. S., Tay, B. K., Lau, S. P., Shi, X., Cheng, Y. H. |
| المصدر: | Thin Solid Films; 2001, Vol. 386 Issue: 1 p1-5, 5p |
| قاعدة البيانات: | Supplemental Index |
| تدمد: | 00406090 |
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| DOI: | 10.1016/S0040-6090(00)01878-2 |