Academic Journal
Investigation of sheath properties in Ar/SF6 dc discharge plasma.
| العنوان: | Investigation of sheath properties in Ar/SF6 dc discharge plasma. |
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| المؤلفون: | Boruah, D, Pal, A R, Bailung, H, Chutia, Joyanti |
| المصدر: | Journal of Physics D: Applied Physics; 3/21/2003, Vol. 36 Issue 6, p645-652, 8p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 00223727 |
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| DOI: | 10.1088/0022-3727/36/6/306 |