Conference
Monte Carlo simulation of X-ray diffraction embedded in experimental determination of residual stresses in microsystems.
| العنوان: | Monte Carlo simulation of X-ray diffraction embedded in experimental determination of residual stresses in microsystems. |
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| المؤلفون: | Zschenderlein, U., Wunderle, B. |
| المصدر: | 2011 12th International Conference on Thermal, Mechanical & Multi-Physics Simulation & Experiments in Microelectronics & Microsystems (EuroSimE); 2011, p1/7-7/7-7/7, 1p |
| قاعدة البيانات: | Complementary Index |
| ردمك: | 9781457701078 |
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| DOI: | 10.1109/ESIME.2011.5765774 |