التفاصيل البيبلوغرافية
| العنوان: |
Nonlinear piezoelectric quartz MEMS resonator with electrically tunable stability for enhanced performance of resonant accelerometer. |
| المؤلفون: |
Bu, Kai, Li, Cun, Zhao, Yulong, Li, Bo, Xue, Hong, Ai, Jiabin, Zhou, Shengxiang |
| المصدر: |
Applied Physics Letters; 12/16/2024, Vol. 125 Issue 25, p1-9, 9p |
| مصطلحات موضوعية: |
CRYSTAL oscillators, CRYSTAL resonators, MEMS resonators, QUALITY factor, ATMOSPHERIC pressure |
| مستخلص: |
Piezoelectric quartz resonators are attracting increasing attention in resonant accelerometers due to their excellent quality factor and stable crystal structure, which helps to achieve more robust mechanical sensing. Previously quartz resonators operated in the linear region of an atmospheric pressure environment. To achieve a better signal-to-noise ratio, it is imperative to investigate the effect of nonlinear effects on the performance of quartz resonators. In this work, piezoelectric quartz resonators' nonlinear dynamics are researched, and frequency bifurcation and phase stretching phenomena are systematically characterized. We show the effect of the quality factor and temperature on the bifurcation point and reveal the modulation mechanism of the resonator operating point on stability. We find a method to rapidly change the stability and bandwidth of the resonator by conveniently tuning the electrical parameters and validate it in static and dynamic experiments on a quartz resonant accelerometer, which can be used in resonant sensors and actuators. [ABSTRACT FROM AUTHOR] |
|
Copyright of Applied Physics Letters is the property of American Institute of Physics and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) |
| قاعدة البيانات: |
Complementary Index |