Conference
Magnetostrictively deforming the surface of a Silicon wafer at two locations.
| العنوان: | Magnetostrictively deforming the surface of a Silicon wafer at two locations. |
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| المؤلفون: | Ulmer, M. P., Coppejans, R., Khreishi, M. A., Keely, K., Buchholz, D. B., Shiri, R., Rodriguez, L. A., O'Donnell, A. E., Shonfeld, Z. J., Reinhardt, W. H., Borgsmiller, L. E., Baturalp, T. B., Coverstone, V. L., Caoe, J. |
| المصدر: | Proceedings of SPIE; 7/8/2018, Vol. 10761, p1-9, 9p |
| قاعدة البيانات: | Complementary Index |
| تدمد: | 0277786X |
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| DOI: | 10.1117/12.2322511 |