التفاصيل البيبلوغرافية
| العنوان: |
Molybdenum angular sputtering distribution under low energy xenon ion bombardment. |
| المؤلفون: |
Oyarzabal, E.1 eoyarzabal@ferp.ucsd.edu, Yu, J. H.1, Doerner, R. P.1, Tynan, G. R.1, Schmid, K.2 |
| المصدر: |
Journal of Applied Physics. 9/15/2006, Vol. 100 Issue 6, p063301. 6p. 3 Diagrams, 1 Chart, 5 Graphs. |
| مصطلحات موضوعية: |
*MOLYBDENUM, *CATHODE sputtering (Plating process), *PLASMA gases, *NUCLEAR quadrupole resonance spectroscopy, *ANGULAR distribution (Nuclear physics), *MONTE Carlo method, *XENON spectra |
| مستخلص: |
The molybdenum angular sputtering distribution is measured during xenon ion bombardment from a plasma, with incident ion energy EXe ranging between 75 and 225 eV. A quadrupole mass spectrometer (QMS) is used to detect the fraction of sputtered neutrals that is ionized in the plasma and to obtain the angular distribution by changing the angle θ between the target normal and the QMS aperture. The results obtained in these experiments are relative and normalized to the existing data in the literature. The angular sputtering distribution for molybdenum has a maximum at θ=60°, and this maximum becomes less pronounced as the incident ion energy increases. The dependence of the total sputtering yield on incident ion energy is in good agreement with previous experiments. There is an order of magnitude increase in the sputtering yield as EXe is increased from 75 to 125 eV, and a more moderate increase for higher energies. The results of a simulation of the angular distribution of molybdenum atoms sputtered by xenon bombardment using a Monte Carlo code are also presented. They are in agreement with the experiments showing an “under-cosine” distribution (peaked at θ=45°–60°) for the lower energies which evolves towards a cosine distribution as the incident ion energy increases. [ABSTRACT FROM AUTHOR] |
| قاعدة البيانات: |
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