| LEADER | 00000cam a22000007a 4500 | ||
|---|---|---|---|
| 001 | in00000091161 | ||
| 003 | KWAREICT | ||
| 005 | 20220221100825.0 | ||
| 008 | 161003s2011 flua b 001 0 eng | ||
| 020 | |a 9781439813874 | ||
| 035 | |a (Kwareict) u29424 | ||
| 035 | |a (KWAREICT)u29424 | ||
| 040 | |c KwareTech | ||
| 082 | 0 | 4 | |a 681.2 S E D |2 21 |
| 245 | 0 | 0 | |a Semiconductor device-based sensors for gas, chemical, and biomedical applications / |c edited by Fan Ren & Stephen J. Pearton. |
| 260 | |a Boca Raton, Fla. : |b CRC, |c 2011. | ||
| 300 | |a xii, 312 p. : |b ill. (some col.) ; |c 27 cm. | ||
| 336 | |a txt |b txt | ||
| 504 | |a Includes bibliographical references and index. | ||
| 505 | 0 | 0 | |g Machine generated contents note: |g 1.1. |t Introduction / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.2. |t A1GaN Field-Effect Sensors / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.3. |t Fabrication and Characterization of A1GaN/GaN Sensors / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.3.1. |t Growth of the Heterostructure / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.3.2. |t Sensor Processing / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.3.3. |t Electrical Characterization of the A1GaN/GaN Heterostructure / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.3.4. |t Technology Impact on the Surface and Sensor Properties / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.3.5. |t Biocompatibility of the Sensor / |r M. Gebinoga / |r A. Schober / |r I. Cimalla / |r V. Lebedev / |r V. Cimalla / |r V. Polyakov |
| 505 | 0 | 0 | |g 1.4. |t Measurement Conditions / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.4.1. |t Buffer Solutions / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.4.2. |t Characterization Setup / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.4.3. |t Noise and Drift / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.4.4. |t Cell-Based Sensor-CPFET / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.4.5. |t NG 108-15 Nerve Cell Line / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.4.6. |t Neurotransmitters-Acetylcholine / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.4.7. |t Neuroinhibitors / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.4.8. |t Cell Media / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.5. |t Cell Coupling to an A1GaN/GaN ISFET / |r V. Cimalla / |r I. Cimalla / |r V. Lebedev / |r A. Schober / |r V. Polyakov / |r M. Gebinoga |
| 505 | 0 | 0 | |g 1.5.1. |t Sensor Preparation / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.5.2. |t Sensor Response to pH Changes in Cell Media with/without Cells / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.5.3. |t Ion Sensitivity of AlGaN/GaN ISFETs / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.5.4. |t Sensitivity of A1GaN/GaN ISFETs to Inhibitors / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.6. |t Recording of Extracellular Signal / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.6.1. |t Response on Single Inhibitors in SCZ Buffer / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.6.2. |t Response on Single Inhibitors in DMEM / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.6.3. |t Sensor Response on Different Neurotoxins / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.7. |t Sensor Signal Simulation / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober |
| 505 | 0 | 0 | |g 1.7.1. |t Self-Consistent Simulation of the Heterostructure Using a Site-Binding Model / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 1.7.2. |t Estimation of the Ion Flux in Cleft / |r V. Polyakov / |r V. Lebedev / |r A. Schober / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla -- |g 1.8. |t Summary / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |t Acknowledgments / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |t References / |r I. Cimalla / |r M. Gebinoga / |r V. Cimalla / |r V. Polyakov / |r V. Lebedev / |r A. Schober -- |g 2.1. |t Introduction / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.2. |t Gas Sensing / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.2.1. |t O2 Sensing / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.2.2. |t CO2 Sensing / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.2.3. |t CH4 Sensing / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.3. |t Sensor Functionalization / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.4. |t pH Measurement / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton |
| 505 | 0 | 0 | |g 2.5. |t Exhaled Breath Condensate / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.6. |t Heavy Metal Detection / |r Jenshan Lin / |r F. Ren / |r S.J. Pearton / |r C.Y. Chang / |r B.H. Chu -- |g 2.7. |t Biotoxin Sensors / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.7.1. |t Botulinum / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.8. |t Biomedical Applications / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.8.1. |t pH Sensing in Breath Condensate / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.8.2. |t Glucose Sensing / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.8.3. |t Prostate Cancer Detection / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.8.4. |t Kidney Injury Molecule Detection / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.8.5. |t Breast Cancer / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.8.6. |t Lactic Acid / |r B.H. Chu / |r C.Y. Chang / |r S.J. Pearton / |r Jenshan Lin / |r F. Ren -- |g 2.8.7. |t Chloride Ion Detection / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton |
| 505 | 0 | 0 | |g 2.8.7.1. |t HEMT Functionalized with Ag/AgC1 / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.8.7.2. |t HEMT Functionalized with InN / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.8.8. |t Pressure Sensing / |r S.J. Pearton / |r Jenshan Lin / |r C.Y. Chang / |r B.H. Chu / |r F. Ren -- |g 2.8.9. |t Traumatic Brain Injury / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.9. |t Endocrine Disrupter Exposure Level Measurement / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.10. |t Wireless Sensors / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 2.11. |t Summary and Conclusions / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |t Acknowledgments / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |t References / |r B.H. Chu / |r C.Y. Chang / |r F. Ren / |r Jenshan Lin / |r S.J. Pearton -- |g 3.1. |t Introduction / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.2. |t A1GaN/GaN HEMT Schottky-Diode-Based Hydrogen Sensor / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang |
| 505 | 0 | 0 | |g 3.2.1. |t Basic Schottky Diode Hydrogen Sensor / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.2.1.1. |t Device Structure and Fabrication / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.2.1.2. |t Testing Procedure / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.2.1.3. |t Experimental Results / |r Byung Hwan Chu / |r Yu-Lin Wang / |r Travis J. Anderson / |r Jenshan Lin / |r Fan Ren / |r Stephen J. Pearton -- |g 3.2.2. |t TiB2 Ohmic Contacts / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.2.3. |t Effect of Humidity on Hydrogen Sensors / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.2.4. |t Differential Sensor / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.3. |t GaN Schottky Diode Sensor / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.3.1. |t N-face and Ga-face Comparison / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang |
| 505 | 0 | 0 | |g 3.3.1.1. |t Device Structure and Fabrication / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.3.1.2. |t Experimental Results / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.3.2. |t W/Pt-Contacted GaN Schottky Diodes / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.4. |t Nanostructured Wide-Bandgap Materials / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.4.1. |t Hydrogen Sensors Based on ZnO Nanorods / |r Fan Ren / |r Travis J. Anderson / |r Jenshan Lin / |r Yu-Lin Wang / |r Stephen J. Pearton / |r Byung Hwan Chu -- |g 3.4.1.1. |t Device Structure and Fabrication / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.4.1.2. |t Experimental Results / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.4.2. |t GaN Nanowires / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang |
| 505 | 0 | 0 | |g 3.4.3. |t InN Nanobelts / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.4.4. |t Single ZnO Nanowire / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang |
| 505 | 0 | 0 | |g Note continued: |g 3.5. |t SiC Schottky Diode Hydrogen Sensor / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.6. |t Wireless Sensor Network Development / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.6.1. |t Sensor Module / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.6.1.1. |t Description of Wireless Transceiver / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.6.1.2. |t Description of Web Server / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.6.2. |t Field Test / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren -- |g 3.6.2.1. |t Initial Field Test Results / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang |
| 505 | 0 | 0 | |g 3.6.2.2. |t Improved Field Test Results / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 3.7. |t Summary / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |t Acknowledgments / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |t References / |r Travis J. Anderson / |r Byung Hwan Chu / |r Fan Ren / |r Stephen J. Pearton / |r Jenshan Lin / |r Yu-Lin Wang -- |g 4.1. |t Introduction / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo -- |g 4.2. |t Surface Properties of InN / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo -- |g 4.2.1. |t Electronic Properties / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo -- |g 4.2.2. |t Chemical Sensing Properties / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo |
| 505 | 0 | 0 | |g 4.3. |t InN-Based Chemical Sensors Development / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo -- |g 4.3.1. |t Ion-Selective Electrode (ISE) / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo -- |g 4.3.1.1. |t Device Fabrication / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo -- |g 4.3.1.2. |t Testing Procedure and Results / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo -- |g 4.3.2. |t Ion-Sensitive Field-Effect Transistor (ISFET) / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo -- |g 4.3.2.1. |t Device Fabrication / |r Hong-Mao Lee / |r Shangjr Gwo / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong -- |g 4.3.2.2. |t Testing Procedure and Results / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo -- |g 4.4. |t Summary / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo |
| 505 | 0 | 0 | |t Acknowledgments / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |r Shangjr Gwo -- |t References / |r Yuh-Hwa Chang / |r Yen-Sheng Lu / |r J. Andrew Yeh / |r Yu-Liang Hong / |r Hong-Mao Lee / |g 5.1. |t Introduction / |r Y.W. Heo / |r S.J. Pearton / |r D.P. Norton / |r F. Ren -- |g 5.2. |t Basic Properties of ZnO / |r F. Ren / |r D.P. Norton / |r Y.W. Heo / |r S.J. Pearton -- |g 5.3. |t Dopants in ZnO / |r F. Ren / |r D.P. Norton / |r S.J. Pearton / |r Y.W. Heo -- |g 5.4. |t Ion Implantation / |r S.J. Pearton / |r F. Ren / |r D.P. Norton / |r Y.W. Heo -- |g 5.5. |t Etching of ZnO / |r D.P. Norton / |r F. Ren / |r S.J. Pearton / |r Y.W. Heo -- |g 5.6. |t Ohmic Contacts / |r S.J. Pearton / |r F. Ren / |r D.P. Norton / |r Y.W. Heo -- |g 5.7. |t Schottky Contact / |r D.P. Norton / |r F. Ren / |r S.J. Pearton / |r Y.W. Heo -- |g 5.8. |t Properties of Hydrogen in ZnO / |r S.J. Pearton / |r F. Ren / |r D.P. Norton / |r Y.W. Heo -- |g 5.8.1. |t Proton Implantation / |r D.P. Norton / |r F. Ren / |r S.J. Pearton / |r Y.W. Heo -- |g 5.8.2. |t Hydrogen Plasma Exposure / |r S.J. Pearton / |r D.P. Norton / |r F. Ren / |r Y.W. Heo -- |g 5.9. |t Ferromagnetism in ZnO / |r S.J. Pearton / |r Y.W. Heo / |r D.P. Norton / |r F. Ren |
| 505 | 0 | 0 | |g 5.9.1. |t Ferromagnetism in Semiconductors / |r Y.W. Heo / |r S.J. Pearton / |r D.P. Norton / |r F. Ren -- |g 5.9.2. |t Spin Polarization in ZnO / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.9.3. |t Nanorods / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.9.4. |t Properties of Mn- and Co-Implanted Bulk ZnO / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.10. |t Gas Sensing Using ZnO Thin Film / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.10.1. |t Ethylene Sensing / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.10.2. |t CO Sensing / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.11. |t Transport in ZnO Nanowires / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.12. |t ZnO Nanowire Schottky Diodes / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.13. |t ZnO Nanowire MOSFET / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.14. |t UV Nanowire Photodetectors / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.15. |t Gas and Chemical Sensing / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.15.1. |t Hydrogen Sensing with ZnO nanowires / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton |
| 505 | 0 | 0 | |g 5.15.2. |t Ozone Sensing / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.15.3. |t pH Response / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.16. |t Biological Sensing / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.16.1. |t Surface Modification of ZnO / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.16.2. |t Using Protein Immobilization for Ultrasensitive Detection of Proteins and Single Viruses / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.16.3. |t Immobilization of Nucleic Acids on Nanowires for Biosensors for Genes and mRNA / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.16.4. |t Direct Immobilization of Aptamers for Ultrasensitive Detection of Proteins and Drug Molecules / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.16.5. |t ZnO Nanowires with Various Doping and Surface Chemistry Terminations / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.16.6. |t A 3D Self-Consistent Simulator for a Biological Sensor / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |g 5.17. |t Summary / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |t Acknowledgments / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton -- |t References / |r Y.W. Heo / |r F. Ren / |r D.P. Norton / |r S.J. Pearton |
| 505 | 0 | 0 | |g 6.1. |t Introduction / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2. |t Models of BioFET Device Operation / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.1. |t FET Operation / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.1.1. |t Charge in a MOSFET / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen -- |g 6.2.1.2. |t Charge Sheet Models for MOSFETs / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.1.3. |t Capacitance / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.1.4. |t Operation of the BioFET / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.1.5. |t Monitoring the Threshold Voltage / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski |
| 505 | 0 | 0 | |g 6.2.2. |t The Oxide Surface and the Electrolyte / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.2.1. |t The Electrolyte and Double Layer / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.2.2. |t The Oxide Surface in an Electrolyte / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.2.3. |t Other Insulators / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen -- |g 6.2.3. |t Molecules on the Oxide Surface / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.3.1. |t Linker Layer / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r G. Lopinski / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r M.J. Deen -- |g 6.2.3.2. |t Charged Membrane-Especially Oligonucleotides / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski |
| 505 | 0 | 0 | |g 6.2.3.3. |t Electrostatics of Brushes and the Donnan Potential / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.4. |t Membrane Model and Poisson-Boltzmann Analysis / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.4.1. |t Donnan Potential / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.4.2. |t Change with Hybridization / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.5. |t Small-Signal Analysis and Sensitivities / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen |
| 505 | 0 | 0 | |g Note continued: |g 6.2.5.1. |t Effects of pH and Hydroxyl Density / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.5.2. |t Ion Sensitivity versus Charge Sensitivity / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.5.3. |t Complexation / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.5.4. |t Impermeable Linking Layer / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.5.5. |t Permeable Linking Layer / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.5.6. |t Transient Effects due to Mixing / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski |
| 505 | 0 | 0 | |g 6.2.5.7. |t Size of the Signal / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.6. |t Large-Signal Models of the BioFET / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen -- |g 6.2.7. |t Limitations of the 1-D Model / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.7.1. |t Manning Condensation / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.7.2. |t Other Mechanisms for the Signal in a BioFET / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.7.3. |t The Mystery of High Signals / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.2.8. |t Comparison with Measurements / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski |
| 505 | 0 | 0 | |g 6.2.9. |t BioFET Simulations in 3-D / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3. |t Impedance Measurements on BioFETs / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3.1. |t Impedance of ISFETs, REFETs, and the First Biomembranes / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen -- |g 6.3.1.1. |t ISFETs / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3.1.2. |t REFETs / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3.1.3. |t Measurement of Differential Output with ISFFET/REFET Pairs / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3.1.4. |t First Impedance Studies of Protein Membranes / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski |
| 505 | 0 | 0 | |g 6.3.1.5. |t Series Resistance of the Electrolyte / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3.2. |t Membrane Sensors / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3.2.1. |t Ion-Selective Surfaces / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3.2.2. |t Antigen[-]Antibody Conjugation / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen -- |g 6.3.2.3. |t Electrochemical (Faradaic) Impedance Spectroscopy / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3.2.4. |t EnFETs / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3.3. |t Detection of DNA Hybridization / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski |
| 505 | 0 | 0 | |g 6.3.3.1. |t SNP Detection in Prehybridized DNA / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.3.3.2. |t SNP Detection for In Situ Hybridization / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r G. Lopinski / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r M.J. Deen -- |g 6.4. |t MOS Nanowire BioFETs / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.1. |t Bioaffinity Sensing with SiNWs / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.1.1. |t Probe Target Binding and the Langmuir Model / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.1.2. |t History / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.2. |t SiNWs Grown by the VLS Method / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski |
| 505 | 0 | 0 | |g 6.4.3. |t Planar MOS Nanowires-No Gating / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.4. |t Back-Gated Planar Sensors / |r M.W. Shinwari / |r M.J. Deen / |r D. Landheer / |r N.G. Tarr / |r W.H. Jiang / |r G. Lopinski / |r G. Dubey / |r W.R. McKinnon -- |g 6.4.4.1. |t Attomolar Detection of Proteins / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.4.2. |t Demonstrations of Back-Gated SiNW Bioaffinity Sensor Performance / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.4.3. |t Nanoribbons / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.5. |t Eliminating the Oxide Layer / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.6. |t Alternate Nanowire Fabrication Methods / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski |
| 505 | 0 | 0 | |g 6.4.7. |t Nanowire Electrical Models / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.7.1. |t Cylindrical Membranes / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.7.2. |t Determination of Nanowire Capacitance and Surface Potential / |r M.W. Shinwari / |r M.J. Deen / |r D. Landheer / |r N.G. Tarr / |r W.H. Jiang / |r G. Lopinski / |r G. Dubey / |r W.R. McKinnon -- |g 6.4.7.3. |t 3-D Models / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.8. |t Slow Response due to Diffusion / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |g 6.4.9. |t Conclusions / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r M.J. Deen / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r G. Lopinski -- |t References / |r D. Landheer / |r W.R. McKinnon / |r W.H. Jiang / |r G. Lopinski / |r G. Dubey / |r N.G. Tarr / |r M.W. Shinwari / |r M.J. Deen -- |g 7.1. |t MEMS Introduction / |r Z.M. Qi / |r H. Xie -- |g 7.1.1. |t MEMS Overview / |r Z.M. Qi / |r H. Xie |
| 505 | 0 | 0 | |g 7.1.2. |t MEMS Fabrication / |r Z.M. Qi / |r H. Xie -- |g 7.1.3. |t Chapter Outline / |r Z.M. Qi / |r H. Xie -- |g 7.2. |t Optical Sensing Principles / |r Z.M. Qi / |r H. Xie -- |g 7.3. |t MEMS-Based Fourier Transform Spectroscopy for Chemical Sensing / |r Z.M. Qi / |r H. Xie -- |g 7.3.1. |t Quantized States in Molecules / |r Z.M. Qi / |r H. Xie -- |g 7.3.2. |t Optical Spectroscopy / |r Z.M. Qi / |r H. Xie -- |g 7.3.3. |t Fourier Transform Spectroscopy / |r Z.M. Qi / |r H. Xie -- |g 7.3.4. |t Fourier Transform Infrared Spectroscopy / |r Z.M. Qi / |r H. Xie -- |g 7.3.5. |t MEMS FTIR / |r Z.M. Qi / |r H. Xie -- |g 7.3.5.1. |t MEMS Actuators / |r Z.M. Qi / |r H. Xie -- |g 7.3.5.2. |t Miniature FTIR Based on Electrostatic Micromirrors / |r Z.M. Qi / |r H. Xie -- |g 7.3.5.3. |t Miniature FTIR Based on Electromagnetic Micromirrors / |r Z.M. Qi / |r H. Xie -- |g 7.3.5.4. |t Miniature FTIR Based on Electrothermal Micromirrors / |r Z.M. Qi / |r H. Xie -- |g 7.3.5.5. |t A Mirror-Tilt-Insensitive (MTI) Fourier Transform Spectrometer / |r Z.M. Qi / |r H. Xie -- |g 7.3.6. |t Summary / |r Z.M. Qi / |r H. Xie -- |g 7.4. |t Interferometric MEMS Chemical and Biochemical Sensors / |r Z.M. Qi / |r H. Xie -- |g 7.4.1. |t Introduction / |r Z.M. Qi / |r H. Xie |
| 505 | 0 | 0 | |g 7.4.2. |t Integrated Optical Mach-Zehnder Interferometer (MZI) Sensors / |r Z.M. Qi / |r H. Xie -- |g 7.4.3. |t Composite Waveguide-Based Polarimetric Interferometer (PI) Sensors / |r Z.M. Qi / |r H. Xie -- |g 7.4.4. |t Integrated Optical Young Interferometer (YI) Sensors / |r Z.M. Qi / |r H. Xie -- |g 7.4.4.1. |t Sensing Principle of Integrated Optical YI / |r Z.M. Qi / |r H. Xie -- |g 7.4.4.2. |t Slab-Type YI Sensors / |r Z.M. Qi / |r H. Xie -- |g 7.4.4.3. |t Stripe-Type YI Sensors / |r Z.M. Qi / |r H. Xie -- |g 7.4.5. |t Integrated Optical Fabry-Perot Interferometer (FPI) Sensor / |r Z.M. Qi / |r H. Xie -- |g 7.4.6. |t Conclusion / |r Z.M. Qi / |r H. Xie -- |t References / |r Z.M. Qi / |r H. Xie. |
| 650 | 0 | 4 | |a Chemical detectors. |
| 650 | 0 | 4 | |a Biosensors. |
| 700 | 1 | |a Ren, F. | |
| 700 | 1 | |a Pearton, S. J. | |
| 942 | |2 ddc |c BOOK | ||
| 999 | |c 14439 |d 14439 | ||
| 999 | f | f | |i 479fd6c7-d6de-5024-bd2e-984a168d1a84 |s d59a9ae3-9b82-556d-aba5-36dd7f7b3b24 |