Academic Journal
Nanocarbon material syntheses and integrations for wafer-scale LSI interconnect applications
| العنوان: | Nanocarbon material syntheses and integrations for wafer-scale LSI interconnect applications / ウェーハスケールLSI微細配線応用に向けたナノカーボン材料技術 |
|---|---|
| المؤلفون: | Tadashi SAKAI, 酒井 忠司 |
| المصدر: | 応用物理 / Oyo Buturi. 2018, 87(2):100 |
| قاعدة البيانات: | J-STAGE |
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edsjst J-STAGE edsjst.oubutsu.87.2.87.100 793 2 Academic Journal academicJournal 793.30712890625 |
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