Academic Journal
222 Simulation of the suppression of dislocation accumulation in ULSI cells
| العنوان: | 222 Simulation of the suppression of dislocation accumulation in ULSI cells / 222 ULSI素子内に蓄積する転位の抑制シミュレーション |
|---|---|
| المؤلفون: | Koki IWAYAMA, Michihiro SATO, Takuya MARUIZUMI, Tetsuya OHASHI, 丸泉 琢也, 佐藤 満弘, 大橋 鉄也, 岩山 光貴 |
| المصدر: | The Proceedings of Conference of Hokkaido Branch. 2017, :35 |
| قاعدة البيانات: | J-STAGE |
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edsjst J-STAGE edsjst.jsmehokkaido.2017.55.0.2017.55.35 781 2 Academic Journal academicJournal 781.496032714844 |
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