Academic Journal
Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
| العنوان: | Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate |
|---|---|
| المؤلفون: | Shibalov, M V, Mumlyakov, A M, Trofimov, I V, Timofeeva, E R, Sirotina, A P, Pershina, E A, Tagachenkov, A M, Anufriev, Y V, Zenova, E V, Porokhov, N V, Tarkhov, M A |
| المساهمون: | Ministry of Science and Higher Education of the Russian Federation |
| المصدر: | Superconductor Science and Technology ; volume 34, issue 8, page 085016 ; ISSN 0953-2048 1361-6668 |
| بيانات النشر: | IOP Publishing |
| سنة النشر: | 2021 |
| نوع الوثيقة: | article in journal/newspaper |
| اللغة: | unknown |
| DOI: | 10.1088/1361-6668/ac0d09 |
| DOI: | 10.1088/1361-6668/ac0d09/pdf |
| الاتاحة: | http://dx.doi.org/10.1088/1361-6668/ac0d09 https://iopscience.iop.org/article/10.1088/1361-6668/ac0d09 https://iopscience.iop.org/article/10.1088/1361-6668/ac0d09/pdf |
| Rights: | https://iopscience.iop.org/page/copyright ; https://iopscience.iop.org/info/page/text-and-data-mining |
| رقم الانضمام: | edsbas.CCFF0B89 |
| قاعدة البيانات: | BASE |
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