Report
卷绕式海绵材料真空磁控溅射镀膜设备的研制 ; R&D of vaccum magnetron sputtering coating system for coiled sponge metallization
| العنوان: | 卷绕式海绵材料真空磁控溅射镀膜设备的研制 ; R&D of vaccum magnetron sputtering coating system for coiled sponge metallization |
|---|---|
| المؤلفون: | 魏海波, 孙清, 张君薇, 池世春 |
| المصدر: | 魏海波,孙清,张君薇,等. 卷绕式海绵材料真空磁控溅射镀膜设备的研制[J]. 真空,2007,44(4):33-35. |
| سنة النشر: | 2007 |
| المجموعة: | Shenyang Institute Of Automation ,Chinese Academy Of Sciences: SIA OpenIR / 中国科学院沈阳自动化研究所机构知识库 |
| مصطلحات موضوعية: | 泡沫镍, 磁控溅射, 海绵, 卷绕系统 |
| الوصف: | 本文介绍了海绵卷绕真空磁控溅射镀膜设备的结构及其特点,采用独特的传动机构,靶极结构及控制方式实现了海绵连续卷绕真空磁控溅射镀膜。 ; Describes the construction and characteristics of the vacuum magnetron sputtering system we developed to doposit metallic thin film on coiled sponge surface,to which the drive system, target and control method were specially designed. |
| نوع الوثيقة: | report |
| اللغة: | Chinese |
| Relation: | http://210.72.131.170//handle/173321/6401 |
| الاتاحة: | http://210.72.131.170//handle/173321/6401 |
| رقم الانضمام: | edsbas.9A0F52A7 |
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