The substructural characteristics of Zn1-xMnxTe films deposited by closed space vacuum sublimation method under various condensation conditions are investigated. Sizes of the coherent scattering domain size, microdeformation degree, staking fault defects’ concentration in the condensates, the averaged dislocation density at the subgrain boundaries and in their bulk as well as the total dislocation concentration are determined by the physical broadening of the X-ray lines using the Cauchy and gauss approximations and the threefold function convolution method. The calculations are compared with data for undoped ZnTe. It is found out that the Mn-doping causes some degradation of structural characteristics of the condensates compared with undoped layers. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35057