Periodical
Dynamics of electromigration induced void/hillock growth and precipitation/dissolution of addition elements studied by in-situ scanning electron microscopy resistance measurements
العنوان: | Dynamics of electromigration induced void/hillock growth and precipitation/dissolution of addition elements studied by in-situ scanning electron microscopy resistance measurements |
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المؤلفون: | D'Haen, J., Cosemans, P., Manca, J.V., Lekens, G., Martens, T., Ceuninck, W. De, D'Olieslaeger, M., Schepper, L. De, Maex, K. |
المصدر: | Microelectronics Reliability; 1999, Vol. 39 Issue: 11 p1617-1630, 14p |
قاعدة البيانات: | Supplemental Index |
تدمد: | 00262714 |
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DOI: | 10.1016/S0026-2714(99)00169-9 |