Academic Journal
Modeling of C4F8 inductively coupled plasmas: effects of high RF power on the plasma electrical properties.
| العنوان: | Modeling of C |
|---|---|
| المؤلفون: | Dain, Guillaume Le, Rhallabi, Ahmed, Girard, Aurélie, Cardinaud, Christophe, Roqueta, Fabrice, Boufnichel, Mohamed |
| المصدر: | Plasma Sources Science & Technology; Aug2019, Vol. 28 Issue 8, p1-13, 13p |
| مصطلحات موضوعية: | COLLISIONS (Nuclear physics), ELECTRON temperature, LANGMUIR probes, ENERGY dissipation, ELECTRON transitions, COLLISION induced dissociation |
| مستخلص: | Part of the electrical parameters of C |
| Copyright of Plasma Sources Science & Technology is the property of IOP Publishing and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.) | |
| قاعدة البيانات: | Complementary Index |
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Array ( [Name] => Author [Label] => Authors [Group] => Au [Data] => <searchLink fieldCode="AR" term="%22Dain%2C+Guillaume+Le%22">Dain, Guillaume Le</searchLink><br /><searchLink fieldCode="AR" term="%22Rhallabi%2C+Ahmed%22">Rhallabi, Ahmed</searchLink><br /><searchLink fieldCode="AR" term="%22Girard%2C+Aurélie%22">Girard, Aurélie</searchLink><br /><searchLink fieldCode="AR" term="%22Cardinaud%2C+Christophe%22">Cardinaud, Christophe</searchLink><br /><searchLink fieldCode="AR" term="%22Roqueta%2C+Fabrice%22">Roqueta, Fabrice</searchLink><br /><searchLink fieldCode="AR" term="%22Boufnichel%2C+Mohamed%22">Boufnichel, Mohamed</searchLink> ) Array ( [Name] => TitleSource [Label] => Source [Group] => Src [Data] => Plasma Sources Science & Technology; Aug2019, Vol. 28 Issue 8, p1-13, 13p ) Array ( [Name] => Subject [Label] => Subject Terms [Group] => Su [Data] => <searchLink fieldCode="DE" term="%22COLLISIONS+%28Nuclear+physics%29%22">COLLISIONS (Nuclear physics)</searchLink><br /><searchLink fieldCode="DE" term="%22ELECTRON+temperature%22">ELECTRON temperature</searchLink><br /><searchLink fieldCode="DE" term="%22LANGMUIR+probes%22">LANGMUIR probes</searchLink><br /><searchLink fieldCode="DE" term="%22ENERGY+dissipation%22">ENERGY dissipation</searchLink><br /><searchLink fieldCode="DE" term="%22ELECTRON+transitions%22">ELECTRON transitions</searchLink><br /><searchLink fieldCode="DE" term="%22COLLISION+induced+dissociation%22">COLLISION induced dissociation</searchLink> ) Array ( [Name] => Abstract [Label] => Abstract [Group] => Ab [Data] => Part of the electrical parameters of C<subscript>4</subscript>F<subscript>8</subscript> inductively coupled plasmas is analyzed experimentally using a global kinetic model. To perform a relevant study of C<subscript>4</subscript>F<subscript>8</subscript> plasmas, we performed Langmuir probe measurements. The latter is based on solving the mass balance equations of all the considered neutral and charged species coupled to the power balance equation and the charge neutrality equation. The model allows the calculation of the densities of neutral and charged species as well as the electron temperature versus the operating conditions. Our study is focused on the analysis of the evolution of C<subscript>4</subscript>F<subscript>8</subscript> plasmas by varying the operating conditions, especially for a very large range of RF power. The simulation reveals an unusual phenomenon characterized by an abrupt transition from an electronegative plasma to an electropositive plasma. Such an abrupt transition is translated into high power by increasing the pressure. This transition phenomenon is explained by the fact that for a power lower than the power transition the electron collision processes are mainly done with the primary molecule, C<subscript>4</subscript>F<subscript>8</subscript> and the heavy molecules such as C<subscript>3</subscript>F<subscript>6</subscript> and C<subscript>2</subscript>F<subscript>4</subscript>. Under these conditions, excitation, dissociation, and attachment processes are more important than those of ionization. However, beyond the transition power values, the electron collisions appear to favor the ionization process of atomic neutrals, F and C, because of the high dissociation of secondary molecules of C<subscript>4</subscript>F<subscript>8</subscript> plasmas. In this case, the light neutrals such as CF<subscript>2</subscript> and CF are also highly dissociated. So, the ionization process to create much electrons becomes the dominant process because of the strong dissociation processes that occur during the transition phase. Thus, the RF power is essentially absorbed through ionization processes leading to the efficient creation of electrons. Under these conditions, the electron energy losses by excitation, attachment, and dissociation processes become lower than the losses due to ionization processes. [ABSTRACT FROM AUTHOR] ) Array ( [Name] => Abstract [Label] => [Group] => Ab [Data] => <i>Copyright of Plasma Sources Science & Technology is the property of IOP Publishing and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract.</i> (Copyright applies to all Abstracts.) ) |
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