المؤلفون: K. Kim, Y. Lee, Ignacio Llamas-Garro, J. -M. Kim

المصدر: SENSORS, 22(23), (2022-12-01)

مصطلحات موضوعية: Fabrication, Glass, Glass substrates, Serpentine, Surface plasmon resonance, Hollow square, Hollow square electrode, MEMS actuators, Otto configuration, Proof mass, Sensing applications, Silicon-on-glass, Surface-plasmon resonance, Vertical MEMS actuator, Vertical movement, Electrodes, silicon, electrode

Relation: https://doi.org/10.3390/s22239490; oai:zenodo.org:7602482

الاتاحة: https://doi.org/10.3390/s22239490

المؤلفون: Kihyun Kim, Yeonsu Lee, Ignacio Llamas-Garro, Jung-Mu Kim

المصدر: Sensors; Volume 22; Issue 23; Pages: 9490

مصطلحات موضوعية: Hollow square electrode, Sensing applications, Hollow square, MEMS actuators, Vertical movement, Serpentine, silicon, electrode, Silicon-on-glass, Biochemistry, Atomic and Molecular Physics, and Optics, vertical MEMS actuator, hollow square electrode, SiOG, Otto configuration, surface plasmon resonance, Surface-plasmon resonance, Vertical MEMS actuator, Analytical Chemistry, Glass substrates, Fabrication, Surface plasmon resonance, Glass, Electrical and Electronic Engineering, Proof mass, Instrumentation, Electrodes

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e9f36a6d14b03f9c8bf63662d593d8de
https://zenodo.org/record/7602482