المؤلفون: Nackaerts, Axel, Verhaegen, Staf, Dusa, Mircea, Kattouw, Hans, van Bilsen, Frank, Biesemans, Serge, Vandenberghe, Geert

المساهمون: Wong, Alfred K. K., Singh, Vivek K.

المصدر: SPIE Proceedings ; Design for Manufacturability through Design-Process Integration ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.713385
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.713385

المؤلفون: Megens, Henry, van Haren, Richard, Musa, Sami, Doytcheva, Maya, Lalbahadoersing, Sanjay, van Kemenade, Marc, Lee, Hyun-Woo, Hinnen, Paul, van Bilsen, Frank

المساهمون: Archie, Chas N.

المصدر: SPIE Proceedings ; Metrology, Inspection, and Process Control for Microlithography XXI ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.712149

المؤلفون: Huijbregste, Jeroen, van Haren, Richard J. F., Jeunink, Andre, Hinnen, Paul C., Swinnen, Bart, Navarro, Ramon, Simons, Geert, van Bilsen, Frank, Tolsma, Hoite, Megens, Henry J. L.

المساهمون: Herr, Daniel J.

المصدر: SPIE Proceedings ; Metrology, Inspection, and Process Control for Microlithography XVII ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.482814
http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.482814

المؤلفون: Navarro, Ramon, Keij, Stefan, den Boef, Arie J., Schets, Sicco, van Bilsen, Frank, Simons, Geert, Schuurhuis, Ron, Burghoorn, Jaap

المساهمون: Sullivan, Neal T.

المصدر: SPIE Proceedings ; Metrology, Inspection, and Process Control for Microlithography XV ; ISSN 0277-786X

الاتاحة: http://dx.doi.org/10.1117/12.436795