المؤلفون: Tatsuki Sasaki (11468358), Lina Sun (158687), Yu Kurosawa (11468361), Tatsuhiro Takahashi (7817663), Yoshiyuki Suzuri (4495210)

مصطلحات موضوعية: Biophysics, Cell Biology, Ecology, Cancer, Infectious Diseases, Biological Sciences not elsewhere classified, Chemical Sciences not elsewhere classified, Physical Sciences not elsewhere classified, results presented herein, results obtained using, residual hydrogen atoms, relatively slow process, relatively high density, ray photoelectron spectroscopy, flexible organic light, atomic rearrangement induced, also critical components, thick sin films, 2 , tfe barrier films, phps film composition, film composition, film encapsulation, film densification, widely used, sufficient detail, strongly related, simultaneous cleavage, processed thin, processed perhydropolysilazane

Relation: https://figshare.com/articles/journal_contribution/Nanometer-Thick_SiN_Films_as_Gas_Barrier_Coatings_Densified_by_Vacuum_UV_Irradiation/16663746

الاتاحة: https://doi.org/10.1021/acsanm.1c01862.s001