المؤلفون: Xinxin Li, Yimeng Wang, Yingchun Guan

المصدر: Micromachines; Volume 12; Issue 3; Pages: 262

مصطلحات موضوعية: laser grinding, nanosecond laser, single-crystal silicon wafer, surface finishing, resistivity

وصف الملف: application/pdf

Relation: E：Engineering and Technology; https://dx.doi.org/10.3390/mi12030262

الاتاحة: https://doi.org/10.3390/mi12030262

المؤلفون: Yudai SHIROKI, Kazuki IIDA, Satoshi SUTO, Masayoshi TATENO

المصدر: Mechanical Engineering Journal, Vol 6, Iss 4, Pp 19-00062-19-00062 (2019)

مصطلحات موضوعية: single crystal silicon wafer, fracture toughness, furnace temperature conditions, controlled surface flow method, ion shower, Mechanical engineering and machinery, TJ1-1570

وصف الملف: electronic resource

Relation: https://www.jstage.jst.go.jp/article/mej/6/4/6_19-00062/_pdf/-char/en; https://doaj.org/toc/2187-9745

URL الوصول: https://doaj.org/article/3a8dbfd35df649228ebfa1e73d67c99d

المؤلفون: Kazuki IIDA, Masayoshi TATENO, Satoshi SUTO, Yudai SHIROKI, 白木 雄大, 立野 昌義, 須藤 聡, 飯田 和樹

المصدر: The Proceedings of Ibaraki District Conference. 2018, :205

المؤلفون: Yingchun Guan, Xinxin Li, Yimeng Wang

المصدر: Micromachines, Vol 12, Iss 262, p 262 (2021)
Micromachines
Volume 12
Issue 3

مصطلحات موضوعية: Materials science, Microscope, Laser scanning, Scanning electron microscope, lcsh:Mechanical engineering and machinery, 02 engineering and technology, 01 natural sciences, Article, law.invention, laser grinding, law, nanosecond laser, 0103 physical sciences, Surface roughness, Wafer, lcsh:TJ1-1570, Electrical and Electronic Engineering, 010302 applied physics, business.industry, Mechanical Engineering, 021001 nanoscience & nanotechnology, Laser, Grinding, surface finishing, resistivity, single-crystal silicon wafer, Control and Systems Engineering, Optoelectronics, 0210 nano-technology, business, Surface finishing

وصف الملف: application/pdf

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::235d107cd1a9eb52058d316aac196a25
https://www.mdpi.com/2072-666X/12/3/262

المؤلفون: Suet To, Xiangqian Jiang, Zhen Tong, Zhiwei Zhu

المصدر: CIRP Annals. 68:559-562

مصطلحات موضوعية: Materials science, Matching (graph theory), Mechanical Engineering, Single crystal silicon wafer, Mechanical engineering, Diamond turning, Servomechanism, Industrial and Manufacturing Engineering, law.invention, Brittleness, Machining, law, Planning algorithms, Servo

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::11d5465af0f300a954745e30c8503ffd
https://doi.org/10.1016/j.cirp.2019.04.092

المؤلفون: Weijia Guo, Xinquan Zhang, Senthil Kumar Anantharajan, Hui Deng

المصدر: Journal of Micro and Nano-Manufacturing. 8

مصطلحات موضوعية: 010302 applied physics, Materials science, Plasma etching, business.industry, Process Chemistry and Technology, Single crystal silicon wafer, fungi, technology, industry, and agriculture, Atmospheric-pressure plasma, macromolecular substances, 02 engineering and technology, 021001 nanoscience & nanotechnology, 01 natural sciences, Industrial and Manufacturing Engineering, stomatognathic system, Mechanics of Materials, Etching (microfabrication), 0103 physical sciences, Surface roughness, Optoelectronics, Layer removal, 0210 nano-technology, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::8da4a291a0412fa2e21c1a37555bc644
https://doi.org/10.1115/1.4046377

المؤلفون: S Ronald Allan, de los Reyes

المصدر: Solid State Phenomena. 261:93-100

مصطلحات موضوعية: 0209 industrial biotechnology, Materials science, Silicon, Single crystal silicon wafer, chemistry.chemical_element, 02 engineering and technology, Condensed Matter Physics, Atomic and Molecular Physics, and Optics, In plane, Surface micromachining, 020303 mechanical engineering & transports, 020901 industrial engineering & automation, 0203 mechanical engineering, chemistry, Specific energy, General Materials Science, Composite material

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::64267dd2febd2834899d08d5747a976b
https://doi.org/10.4028/www.scientific.net/ssp.261.93

المؤلفون: Young Suk Kim, Sang-Min Lee, Takayuki Ohba, Taek-Soo Kim, Jae-Han Kim

المصدر: 2018 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC).

مصطلحات موضوعية: Materials science, Single crystal silicon wafer, technology, industry, and agriculture, Modulus, 02 engineering and technology, Stress distribution, 021001 nanoscience & nanotechnology, 020303 mechanical engineering & transports, 0203 mechanical engineering, Femtosecond, Gauge length, Wafer, sense organs, Composite material, 0210 nano-technology, Anisotropic elasticity, Tensile testing

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::107c6f54c5133d8e7f3c0224b3caf3cf
https://doi.org/10.23919/icep.2018.8374318

المؤلفون: Masayoshi TATENO, Mitsuhiro YOKOTA, Satoshi SUTO, Tomoya ONOZAWA, 小野澤 友弥, 横田 充宏, 立野 昌義, 須藤 聡

المصدر: The Proceedings of Conference of Kanto Branch. 2013, :213

المؤلفون: Masayoshi MIYASAKA, Masayoshi TATENO, Ryo ISHIKITA, Satoshi SUTO, 宮坂 正義, 石北 凌, 立野 昌義, 須藤 聡

المصدر: The Proceedings of Conference of Kanto Branch. 2013, :215

المؤلفون: Hiroshi NAKAMURA, Kunio KOKUBO, Masayoshi TATENO, 中村 博志, 小久保 邦雄, 立野 昌義

المصدر: The Proceedings of Conference of Kanto Branch. 2009, :539

المؤلفون: Junichi SHIBUGUCHI, Masayoshi MIYASAKA, Masayoshi TATENO, Satoshi SUTO, 宮坂 正義, 渋口 純一, 立野 昌義, 須藤 聡

المصدر: The Proceedings of Conference of Kanto Branch. 2011, :29

المؤلفون: Masayoshi MIYASAKA, Masayoshi TATENO, Satoshi SUTOH, Yoshiki GOTOH, 宮坂 正義, 後藤 芳樹, 立野 昌義, 須藤 聡

المصدر: The Proceedings of Conference of Kanto Branch. 2010, :483

المؤلفون: Kazuki Takashima, Satoru Koyama, Yakichi Higo, 小山 聡, 肥後 矢吉, 高島 和希

المصدر: 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） / IEEJ Transactions on Sensors and Micromachines. 2005, 125(7):302

المؤلفون: Masayoshi MIYASAKA, Masayoshi TATENO, Satoshi SUTO, Yoshiki GOTOH, 宮坂 正義, 後藤 芳樹, 立野 昌義, 須藤 聡

المصدر: The Proceedings of Yamanashi District Conference. 2010, :142

المؤلفون: Masayoshi TATENO, Satoshi SUTO, Tomoya ONOZAWA, 小野澤 友弥, 立野 昌義, 須藤 聡

المصدر: The Proceedings of Yamanashi District Conference. 2012, :126

المؤلفون: Xing-Rui Liu, Dong Wang, Li-Jun Wan, Hui-Juan Yan

المصدر: Acta Physico-Chimica Sinica. 32:283-289

مصطلحات موضوعية: In situ, Materials science, Atomic force microscopy, Single crystal silicon wafer, 02 engineering and technology, 010402 general chemistry, 021001 nanoscience & nanotechnology, 01 natural sciences, 0104 chemical sciences, Anode, Physical and Theoretical Chemistry, Composite material, 0210 nano-technology, Interfacial morphology

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d4db1a767bee7c5d63fb8a82f9de4f09
https://doi.org/10.3866/pku.whxb201511132

المؤلفون: Zicheng Lu, Tie Li, Yi Yang, Yuelin Wang, Yunqian He

المصدر: Journal of Micromechanics and Microengineering. 30:015003

مصطلحات موضوعية: Fabrication, Materials science, business.industry, Mechanical Engineering, Single crystal silicon wafer, Diamond, engineering.material, Electronic, Optical and Magnetic Materials, Mechanics of Materials, engineering, Optoelectronics, Electrical and Electronic Engineering, Silicon nanowires, business

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3501c5dcc35ad3db2b2824d278a31b04
https://doi.org/10.1088/1361-6439/ab5125

المؤلفون: Keiichiro Niitsu, Takatoshi Kato, Jiwang Yan, Yu Tayama

المصدر: Surface Topography: Metrology and Properties. 7:015013

مصطلحات موضوعية: Materials science, business.industry, Process Chemistry and Technology, Single crystal silicon wafer, Edge (geometry), Laser, Surfaces, Coatings and Films, Grinding, law.invention, law, Materials Chemistry, Optoelectronics, Single crystal silicon, business, Instrumentation

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3eec91ef89f207cdc2ec52185a1541a7
https://doi.org/10.1088/2051-672x/aafe3c

المؤلفون: Richard D. Albright

مصطلحات موضوعية: Engineering, business.industry, media_common.quotation_subject, Single crystal silicon wafer, Investment (macroeconomics), Recession, BRIC, Unexploded ordnance, Hardware_INTEGRATEDCIRCUITS, Forensic engineering, Credit crunch, Electronics, Underwater, business, Industrial organization, media_common

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::1a6b00ad66fff6cf1a0809ec9ce5108d
https://doi.org/10.1016/b978-1-4377-3477-5.00006-4