المؤلفون: Hajimiri, A., Komijani, A., Natarjan, A., Chunara, R., Guan, X., Hashemi, H.

المصدر: IEEE Communications Magazine, 42(8), 122-130, (2004-08-01)

مصطلحات موضوعية: 24 GHz, MIMO system, array gain, commercial silicon process technology, multiple input multiple output system, phased array system, silicon-based fully integrated phased array system, spatial directivity, spectral efficiency, vehicular radar application, wireless communication

Relation: https://doi.org/10.1109/MCOM.2004.1321403; eprintid:437; resolverid:CaltechAUTHORS:HAJieeecm04

الاتاحة: https://doi.org/10.1109/MCOM.2004.1321403

المؤلفون: 福田, 永, FUKUDA, Hisashi, フクダ, ヒサシ, 田中, 茂雄, TANAKA, Shigeo, タナカ, シゲオ, 渡邊, 幹夫, WATANABE, Mikio, ワタナベ, ミキオ, 佐藤, 孝紀, サトウ, コウキ, SATOH, Kohki, 古川, 雅一, FURUKAWA, Masakazu, フルカワ, マサカズ

مصطلحات موضوعية: plasma processing, silicon process technology, ashing, neutral hydrogen

Time: 549

وصف الملف: application/pdf

Relation: 110001263633; 室蘭工業大学紀要; 54; 29; 35; Memoirs of the Muroran Institute of Technology; AA11912609; https://muroran-it.repo.nii.ac.jp/record/8405/files/54_irai04.pdf

الاتاحة: https://muroran-it.repo.nii.ac.jp/record/8405/files/54_irai04.pdf

Additional Titles: Neutral Hydrogen Atom Generation by Surface Wave Excitation Plasma and Its Application to Resist Ashing

المؤلفون: 福田 永, 田中 茂雄, 渡邊 幹夫, 佐藤 孝紀, 古川 雅一

مصطلحات الفهرس: plasma processing, silicon process technology, ashing, neutral hydrogen, 549, Departmental Bulletin Paper

URL: http://hdl.handle.net/10258/62
http://ci.nii.ac.jp/naid/110001263633
http://ci.nii.ac.jp/naid/110001263633